
SEMICONDUCTOR

DISPLAY & OLED

OPTO ELECTRONICS
- PECVD
- Dry cleaning
- Single LPCVD
- Applications
-
- ACL
- SiON, SiN, SiO2, SiCN
- Features
-
- Multi process capability & Maximized Productivity
- Optimized system energy savings
& Environmental Safety
- Easy Maintenance & Excellent Technical Support
- Lowest cost of ownership