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Display & OLED
> BUSINESS > DISPLAY & OLED > PATHFINDER SERIES
  • SEMICONDUCTOR

    SEMICONDUCTOR

  • DISPLAY & OLED

    DISPLAY & OLED

  • OPTO ELECTRONICS

    OPTO ELECTRONICS

  • Pathfinder Series
  • Pathfinder Series
  • Applications
  • - AIOx
    - SiNx, SiOx, SiON, SiOC
  • Features
  • - Low Temperature OLED Encapsulation ≤ 90°C
    - High Throughput - ALD ≥ 6nm/min
    - Compact Footprint
    - High Deposition Rate - SiNx ≥ 250nm/min
    - WVTR(SiNx) ≤ 10-4 g/m2·day
    - Excellent Reproducibility
  • pathfinder

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